Transpector APX Multi-Pressure
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INFICON Transpector APX remains the market leading Residual Gas Analyzer (RGA) for semiconductor and display process monitoring. INFICON knows semiconductor and display customers have unique needs, and the latest revision of the Transpector APX allows for more flexibility to meet specific application requirements, while maintaining industry leading measurement speed and sensitivity. Transpector APX is the ideal RGA process monitor for semiconductor processes such as ALD, CVD, PVD, and Etch.
Application specific platform design for longest lifetime on your ALD or CVD process for the best wafer and panel protection and process optimization
ALD ready with measurement speeds of over 550 data points per second
Reduced fab footprint by 30% and easier installation due ne high performance pumping system
Configurable HexBlock™ with INFICON proprietary coating with up to three pressure inlets that can withstand harsh corrosive chemistry
