Transpector CPM 3
To acquire the best quotation for your desired product, kindly contact us through e-mail or our contact form.
Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas—enables real-time process monitoring and analysis
ALD-Ready with 1.8 ms per point (555 points per second) measurement speed
Field-proven durability and reliability in the most demanding CVD and Etch applications
Application Integration—Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts
Compact size—allows for easy integration into production semiconductor equipment
Hexblock™ with up to three pressure inlets and reduced surface area to minimize surface reactions and response times
Capacitance Diaphragm Gauge (CDG)—CDG allows user to monitor the process pressure and automatically protect the system from pre ssure excursions
Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching
